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创新工程密封选择


基于多年密封方案设计经验,特瑞堡密封系统可以从广泛的创新密封产品中推荐最佳密封方案,其中许多产品专为满足半导体行业日益严苛的工况而设计。

充气密封

Airseals是由管状弹性体制成的可充气密封件,通过内部加压激活。 它们非常适用,例如洁净室中的真空锁和通道门,从而取代了传统的平垫圈和O形圈,在这些专业应用中提高了性能。

 

有关Airseal充气密封件的更多信息,请联系您当地的营销公司

金属组合密封

特瑞堡密封系统可以有效地将FKMIsolast®和不同材料,如不锈钢和低碳钢,铝,黄铜和各种塑料等制作成组合密封件。

经济有效地最大化密封完整性

组合金属密封件的优点是:

  • 最大化密封完整性
  • 减少凹槽空隙的污染
  • 易于组装
  • 减少库存
  • 高性价比

有关这些定制解决方案的更多信息,请联系当地营销公司


Fleximold

凭借专有的FlexiMold™技术,特瑞堡密封系统可以生产高精度,大直径的O形圈和其他密封型材。 FlexiMold™巨型密封件的质量远优于那些通过拼接密封件或由挤压线圈制成的密封件。

最大限度地缩短了交货时间和降低工具成本
密封件展示了模塑产品的视觉和尺寸完整性无需专用工具即可生产,灵活的生产方式最大程度地缩短了交货时间和成本。

 

各种弹性体制成的大型密封件


推荐用于超过500 mm / 20英寸的O形圈和其他密封型材。

  • 符合ISO 3601-1,AS568JIS B 2401标准,可生产几乎无限大的直径
  • 如果O形圈具有标准横截面,则无需模具费
  • 可以提供更大和特殊的横截面以及其他密封型材。
  • 提供多种弹性体,包括Isolast®FFKM,Resifluor™Fluoroelastomers,FKM,EPDM和HNBR。
  • 密封件生产“零”缺陷质量要求,零件包装和单独标记。
  • 提供Class 100洁净室清洗和包装,以及快递服务。

大型O形圈和密封件主要用于半导体工业中的平板显示器生产。

有关Fleximold™大型密封件的更多信息,请联系您当地的营销公司

O形圈

特瑞堡密封系统提供各种O形圈,可在成本效益和性能之间取得平衡。 可提供任何尺寸的O形圈(标准或定制),包括使用Fleximold™工艺的巨型O形圈。

广泛的密封材料选择

从基本弹性体到专为行业开发的领先化合物。

推荐材料

点击查找更多有关于O形圈和Fleximold™的信息

Turcon Varilip PDR

Turcon®Varilip®PDR(高性能,耐久,可靠)旋转轴密封件由一个或多个Turcon®PTFE基材密封元件构成,固定在精密加工的金属体中

Turcon®密封元件在轴上提供正向动态密封,而金属主体可为壳体提供坚固的静态密封,在高转速下有效运行


较低的摩擦力可降低功耗

该密封件具有低摩擦和无爬行的特点,可降低温度允许更高的圆周速度并降低功耗。测试表明,在Fomblin®油(通常用于半导体真空泵)中运行时,Turcon®Varilip®PDR的扭矩(仅相当于径向油封扭矩的50%左右)。这样可以延长服务寿命,维修将时间最大限度地延长,从而提高生产率。


Turcon®Varilip®PDR密封件的优点包括:

Turcon®PTFE基材密封唇口

•低摩擦,有助于减少功率磨损和摩擦生热
独特的自润滑流体特性进一步减少了摩擦
•先进的几何形状设计可在几乎所有高速旋转情况下提供出色的性能
•多唇口配置,
满足大多数密封需求
•几乎与所有介质兼容
•符合FDA标准

金属体

耐用于恶劣环境
•有效的
静态外周密封
•耐热循环
•可选择高品质金属,
包括不锈钢,铝和其他特殊金属,如Hastelloy®或Titanium
•高耐腐蚀性
卓越的精密加工表面,可改善静态界面的密封性

Overall Turcon® Varilip® PDR seal

•有助于降低设备的功耗
•高速运转能力高达每秒100米/每分钟19,680英尺
工作温度范围-60°至200°C / -76°至392°F
•可用于干运行和软轴
径向油封沟槽的改造
无限保质期,无特殊存储要求

Turcon Variseal

Field-proven in extreme gas and liquid handling situations, Variseal® spring-energized Turcon® PTFE based seals have been used in the most demanding of semiconductor sealing applications, including high vacuum and corrosive environments.

High level of system integrity

With the correct selection of PTFE, filled PTFE compounds and appropriate spring material and profile, Turcon® Variseal® can provide the highest level of system integrity.

For static and dynamic applications, Turcon® Variseal® demonstrates low-friction characteristics, leading to extended service life.

Turcon Variseal NW

The Turcon® case of this flange seal encompasses the energizing spring in such a way that there can be no possible contact between the spring or spring cavity and system media. Ideal for semiconductor applications, it can operate in a vacuum and is proven in fluorine gas.

Features of the Turcon® Variseal® NW seal:

  • Operates in extreme temperatures from -253°C/-423°F to 260°C/500°F
  • Vacuum capability in air to 10-9mbar/ l/s
  • Excellent wear and friction characteristics
  • Compatible with virtually all media and gases including fluorine gas at high temperature
  • Available in custom sizes and standard dimensions with easy retrofit of current NW elastomer seals

Turcon Variseal PS

This high-performance seal has been designed with a Turcon® PTFE based sealing body, encompassing a polymeric spring. The spring is engineered to energize the seal precisely at low pressures, while maintaining high-pressure sealing integrity using the system media pressure. The Turcon® Variseal® PS™ has ultra-low leach out impurities as per SEMI standard F57-0301 and minimal outgassing, making it ideal for use in semiconductor wet processing.

Features of the Turcon® Variseal® PS™ seal:

  • Ultra-low leach out and no outgassing
  • Thermal stability from -253°C/-423°F to 80°C/176°F
  • Vacuum sealing 5.3 x 10-8 mbar/l/s-1 (4.7 x 10-8 psi/in3/s-1) per mm length of seal circumference
  • Excellent wear and friction characteristics
  • Compatible with virtually all chemicals
  • Available in standard and custom seal designs

Turcon Variseal Ultra Clean

This Turcon® Variseal® Ultra-Clean™ seal offers the ultimate in cleanliness, making it ideal for use in processing equipment where maintaining an ultra-clean system is a priority. In the unique design of Turcon® Variseal® Ultra-Clean™, the spring required to activate the seal is fully enclosed within a Turcon® case. This means, in semiconductor fabrication, where the minutest contamination can destroy the effectiveness of wafers, metal extractables are totally excluded.

Features of the Turcon® Variseal® Ultra-Clean™ seal:

  • Operates in extreme temperatures from -253°C / -423°F to 260°C / 500°F
  • Withstands high pressures in excess of 100 bar / 1450 psi
  • Excellent wear and friction characteristics
  • Compatible with virtually all media
  • Suitable for piston, rod, face rotary, reciprocating and static situations
  • Easy retrofit into standard AS-568 O-Ring and Variseal® grooves

V-Ring

A unique all rubber seal for rotary shafts, V-Ring® offers the perfect solution to prevent ingress of media including dirt, dust and water while retaining lubricant. Typical applications are on chemical mechanical polish or wafer dicing equipment, where it operates at a velocity up to 12 m/s / 39 ft/s.

Recommended sealing materials:

Click here to find more information about our rotary seals and V-Rings.

Wills Rings

Wills Rings® are the original metal seals engineered for use in extreme conditions where the capabilities of polymeric seals are exceeded.

Proven in the most demanding of conditions
Operating in temperatures from cryogenic up to 850°C / 1562°F, they withstand pressures from hard vacuum up to 1000 MPa / 145038 psi, 10000 bar. They are ideal for static sealing of connectors, flanges and plates.

Available in various sections and metals
Wills Rings® are available in a wide range of metals, both in O-cross section or C-cross section with either pressure filled or system pressure activation.

Click here to find our Wills Rings® product pages: