Turcon® Variseal® - Spring-Energized Seals for High Vacuum

Turcon® Variseal®

Spring-energized seals for high vacuum and corrosive environments 

Field-proven in extreme gas and liquid handling situations, a number of variations of Turcon® Variseal® spring-energized seals are especially suited to the most demanding of semiconductor sealing applications, including high vacuum and corrosive environments.

Turcon® Variseal® NW 
The Turcon® case of this flange seal encompasses the energizing spring in such a way that there can be no possible contact between the spring or spring cavity and system media. It is ideal for semiconductor applications where it can successfully operate in a vacuum and is proven in fluorine gas.

Features of the Turcon® Variseal® NW seal:
  • Operates in extreme temperatures from -253 °C/ -423 °F to +260 °C/ +500 °F
  • Vacuum capability in air to 10-9mbar/ l/s
  • Excellent wear and friction characteristics
  • Compatible with virtually all media and gases including fluorine gas at high temperature
  • Available in custom sizes and standard dimensions with easy retrofit of current NW elastomer seals

Turcon® Variseal® PS™
This high-performance seal has been designed with a Turcon® PTFE based sealing body and encompasses a polymeric spring. Using the system media pressure, it is engineered to energize the seal precisely at low pressures, while maintaining high-pressure sealing integrity. The Turcon® Variseal® PS™ has ultra-low leach out impurities as per SEMI standard F57-0301 and minimal outgassing, making it ideal for use in semiconductor wet processing.

Features of the Turcon® Variseal® PS™ seal:
  • Ultra-low leach out and no outgassing
  • Thermal stability from -253 °C/ -423 °F to +80 °C/ +176 °F
  • Vacuum sealing 5.3 x 10-8 mbar/l/s-1 (4.7 x 10-8 psi/in3/s-1) per mm length of seal circumference
  • Excellent wear and friction characteristics
  • Compatible with virtually all chemicals
  • Available in standard and custom seal designs

Turcon® Variseal® Ultra-Clean™
This  seal offers the ultimate in cleanliness, making it ideal for use in processing equipment where maintaining an ultra-clean system is top priority. In the unique design of Turcon® Variseal® Ultra-Clean™, the spring required to activate the seal is fully enclosed within a Turcon® case. This means metal extractables are totally excluded, an important factor in semiconductor fabrication where the minutest contamination can destroy the effectiveness of wafers.

Features of the Turcon® Variseal® Ultra-Clean™ seal:
  • Operates in extreme temperatures from -253 °C / -423 °F to +260 °C / +500 °F
  • Withstands high pressures in excess of 100 bar / 1450 psi
  • Excellent wear and friction characteristics
  • Compatible with virtually all media
  • Suitable for piston, rod, face rotary, reciprocating and static situations
  • Easy retrofit into standard AS-568 O-Ring and Variseal® grooves

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