lsolast® PureFab™ offers the ultimate high purity, plasma sealing performance at high temperatures in critical semiconductor applications
The Isolast® PureFab™ range provides the best performance in aggressive front-end processes including deposition, etch, ash/strip, plasma cleaning, and thermal processing such as atomic layer deposition.
The range comprises of leading-edge Perfluoroelastomers (FFKMs) that offer unique properties including high-temperature stability, high purity, exceptionally low trace metal content, and outstanding plasma resistance. This leads to reduced particle generation and ultra-low outgassing performance in high vacuum conditions, enabling end-users to extend their product maintenance cycles while ensuring that process yield is maximized.
To ensure purity of product, all Isolast® PureFab™ seals produced and packed in a Class 100 (ISO5) cleanroom environment.
Trelleborg Sealing Solutions offers a unique and focused material portfolio to match process chemistry, system location and tool complexity:
Other materials in the Isolast® PureFab™ range: