Semiconductor Sealing Materials| Trelleborg

High performance sealing technology

Our extensive range of innovative seal materials helps us deliver exceptional sealing integrity. Any size of O-Ring (standard or custom) is available alongside custom molded seal designs and bonded products - in materials ranging from basic elastomer grades to leading edge, high specification compounds, some specifically developed for semiconductor equipment applications. These innovative sealing materials help reduce downtime and improve production efficiency by extending seal life.

To select the optimum material for your application use our online tools:

  • Material search allows you to identify compounds that meet specific property requirements and those that comply to specific approvals or standards.
  • Chemical compatibility checkallows you to find the level of resistance of material groups to a broad range of media, both fluids or gases including those used within semiconductor manufacturing.

Effective FKM Sealing

Fluoroelastomer (FKM) seals are ideal for downstream applications such as vacuum pumps and wet process applications where temperatures do not exceed 220°C/428°F.

Our range of FKM sealing materials exhibits excellent resistance to a wide range of chemicals used in the semiconductor industry, while offering high purity with low permeation and outgassing levels for semiconductor vacuum applications.

Products:

To select the optimum material for your application use our online tools:

  • Material search allows you to identify compounds that meet specific property requirements and those that comply to specific approvals or standards.
  • Chemical compatibility check allows you to find the level of resistance of material groups to a broad range of media, both fluids or gases including those used within semiconductor manufacturing.

Isolast® Fab Range™

Isolast® Fab Range™ offers the ultimate in elastomer sealing.

These high-performance Perfluoroelastomers (FFKM) are virtually inert and demonstrate almost universal chemical compatibility while operating at continuous temperatures up to 325°C/617°F.

Industry specific sealing

Isolast® J9610 for wet process applications - the highest level of chemical resistance.

  • Isolast® J9610 for wet process applications - the highest level of chemical resistance.
  • Isolast® J9650 for high-temperature wafer processing applications - ultra-high purity.
  • Isolast® J9675 for dry/plasma wafer processes - excellent chemical resistance and minimal particulation.

The Isolast® Fab Range™ sealing materials are available in standard and non-standard O-Rings, engineered molded seal designs or as bonded to metal sealing components. Seals are manufactured and packaged in a cleanroom environment.

To select the optimum material for your application use our online tools:

  • Material search allows you to identify compounds that meet specific property requirements and those that comply to specific approvals or standards.
  • Chemical compatibility check allows you to find the level of resistance of material groups to a broad range of media, both fluids or gases including those used within semiconductor manufacturing.

Resifluor™ 500 increases flexibility

The Resifluor™ 500 range consists of premium FKM sealing materials with modified polymer architecture. Resifluor™ 500 compounds are engineered to combine the chemical resistance of an EPDM towards polar fluids, alkalis and acids, with the performance characteristics of FKM sealing materials in a variety of demanding fluids.

Seals with outstanding resistance

The Resifluor™ 500 sealing range has outstanding resistance to attack by a large number of chemicals and fluids. It has low total organic carbon and metal extractables similar to PTFE, providing exceptional cleanliness.

For further information on Resifluor™ sealing materials please

Contact your local marketing company.

Products

To select the optimum material for your application use our online tools:
  • Material search allows you to identify compounds that meet specific property requirements and those that comply to specific approvals or standards.
  • Chemical compatibility check allows you to find the level of resistance of material groups to a broad range of media, both fluids or gases including those used within semiconductor manufacturing.

Unique Turcon® compounds

Turcon® is the name for the Trelleborg Sealing Solutions range of proprietary PTFE based sealing material.

Inherently, Polytetrafluoroethylene (PTFE) is compatible with almost all chemicals, making it ideal for use in equipment where seals are likely to be exposed to demanding media. Specific operating properties are achieved by the addition of fillers and special processing technologies.

Dynamic and rotating sealing elements

Turcon® sealing materials:

  • Give excellent friction and self-lubricating characteristics
  • Are suited to dynamic and rotating applications

The world’s largest manufacturer of PTFE based seals

Trelleborg Sealing Solutions is the world’s largest manufacturer of seals in this type of material, and no other sealing supplier can offer such a wide range of grades. All of these are produced at our own facilities in Europe, US, South America and Asia.

Products:

Turcon® sealing materials are manufactured in a wide range of different seal geometries. Those listed below are the seal types most commonly used in the semiconductor industry:

To select the optimum material for your application use our online tools:
  • Material search allows you to identify compounds that meet specific property requirements and those that comply to specific approvals or standards.
  • Chemical compatibility check allows you to find the level of resistance of material groups to a broad range of media, both fluids or gases including those used within semiconductor manufacturing.

Advanced engineered thermoplastics

High-performance engineered thermoplastics offer novel sealing solutions in materials such as PEEK™ (Polyether Ether Ketone) and polyimide. These withstand high service temperatures, demonstrate good chemical and plasma resistance, electrostatic control and low outgassing.

From bearing to bellows

HiMod® wear rings

bearings

have proved successful in a number of semiconductor applications which require outstanding dimensional stability and low particle shedding.

Specialized Turcon® PTFE based components include bellows. They offer a high-purity and chemically compatible option for rubber joints.

For further information on engineered thermoplastic sealing solutions please contact your local marketing company.

To select the optimum material for your application use our online tools:

  • Material search allows you to identify compounds that meet specific property requirements and those that comply to specific approvals or standards.
  • Chemical compatibility check allows you to find the level of resistance of material groups to a broad range of media, both fluids or gases including those used within semiconductor manufacturing.