Turcon® Variseal® PS™ for ultra-low leach out
This high-performance seal has been designed with a Turcon® PTFE based sealing body, encompassing a polymeric spring. The spring is engineered to energize the seal precisely at low pressures, while maintaining high-pressure sealing integrity using the system media pressure. The Turcon® Variseal® PS™ has ultra-low leach out impurities as per SEMI standard F57-0301 and minimal outgassing, making it ideal for use in semiconductor wet processing.
Features of the Turcon® Variseal® PS™ seal:
- Ultra-low leach out and no outgassing
- Thermal stability from -253°C/-423°F to 80°C/176°F
- Vacuum sealing 5.3 x 10-8 mbar/l/s-1 (4.7 x 10-8 psi/in3/s-1) per mm length of seal circumference
- Excellent wear and friction characteristics
- Compatible with virtually all chemicals
- Available in standard and custom seal designs
