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Semiconductor

Semiconductor

Turcon® Varilip® PDR performs at high rotary speeds

Turcon® Varilip® PDR (Performance, Durability, Reliability) rotary shaft seals are constructed from one or multiple Turcon® PTFE based sealing elements which are mechanically retained in a precision machined metal body.

The Turcon® sealing element provides positive dynamic sealing on the shaft, while the metal body gives a robust static seal against the housing, performing effectively at high rotary speeds.

Lower friction leads to reduced power consumption

Characterized by low friction and stick-slip-free running, the seal reduces temperature generation, permits higher peripheral speeds and lowers power consumption. Tests show that Turcon® Varilip® PDR requires only around 50 percent of the torque of a radial oil seal when running in Fomblin® oil, commonly used in semiconductor vacuum pumps. This results in a long-service life, with maximized mean time between planned maintenance and greater productivity.

Benefits of Turcon® Varilip® PDR seals include:

Turcon® PTFE based sealing lip

  • Low-friction to facilitate reduced power loss and friction-induced heat
  • Unique self-lubricating hydrodynamic feature further reduces friction
  • Advanced geometries engineered to give excellent performance in almost every high-speed rotary situation
  • Multiple lip configurations to address most sealing needs
  • Material compatible with virtually all media
  • Available in FDA-compliant grades

Metal body

  • Durability in harsh environments
  • Effective sealing on static outer diameter
  • Resistance to thermal cycling
  • Choice of high-quality metals including stainless steel, aluminum and other specialized metals such as Hastelloy® or Titanium
  • High corrosion-resistance
  • Superior precision-machined finish for improved sealing on the static interface

Overall Turcon® Varilip® PDR seal

  • Contributes to a reduction in power consumption of equipment
  • High speed capability up to 100 meters per second / 19,680 feet per minute
  • Wide operating temperature range from -60° to 200°C / -76° to 392°F
  • Options available for dry-running applications and for soft shafts
  • Retrofits in radial oil seal grooves
  • Unlimited shelf life with no special storage requirements