Isolast® Fab Range™

Isolast® Fab Range™ offers the ultimate in elastomer sealing.

These high-performance Perfluoroelastomers (FFKM) are virtually inert and demonstrate almost universal chemical compatibility while operating at continuous temperatures up to 325°C/617°F.

Industry specific sealing

Isolast® Fab Range™ sealing materials are designed for a specific semiconductor processing environments:

• Isolast® J9610 for wet process applications - the highest level of chemical resistance.
• Isolast® J9630 for demanding mid-temperature plasma applications - minimal outgassing and weight loss.
• Isolast® J9650 for high-temperature wafer processing applications - ultra-high purity.
• Isolast® J9670 for high-temperature plasma applications - superior resistance to plasma erosion.
• Isolast® J9675 for dry/plasma wafer processes - excellent chemical resistance and minimal particulation.
• Isolast® J9680 for demanding dry process applications - demonstrates minimal outgassing and particle generation.

The Isolast® Fab Range™ sealing materials are available in standard and non-standard O-Rings, engineered molded seal designs or as bonded to metal sealing components. Seals are manufactured and packaged in a cleanroom environment.

To select the optimum material for your application use our online tools:

• Material search allows you to identify compounds that meet specific property requirements and those that comply to specific approvals or standards.
• Chemical compatibility check allows you to find the level of resistance of material groups to a broad range of media, both fluids or gases including those used within semiconductor manufacturing.