Semiconductor
Semiconductor

Effective FKM Sealing

Semiconductor products

Fluoroelastomer (FKM) seals are ideal for downstream applications such as vacuum pumps and wet process applications where temperatures do not exceed 220°C/428°F.

Our range of FKM sealing materials exhibits excellent resistance to a wide range of chemicals used in the semiconductor industry, while offering high purity with low permeation and outgassing levels for semiconductor vacuum applications.

Products:


To select the optimum material for your application use our online tools:

  • Material search allows you to identify compounds that meet specific property requirements and those that comply to specific approvals or standards.
  • Chemical compatibility check allows you to find the level of resistance of material groups to a broad range of media, both fluids or gases including those used within semiconductor manufacturing.

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