Operating in a vacuum

Vacuum technology plays a critical role in semiconductor manufacturing, being key to process yield and productivity. Semiconductor applications range from dry pumps to more complex subsystems for processes such as photolithography. Maintaining a consistent vacuum is vital, as even minor fluctuations can have a negative affect on the whole production cycle.

Sealing solutions proven through rigorous testing

Effective sealing is an important element in achieving consistent vacuum. To identify the optimum seal for this environment Trelleborg Sealing Solutions has undertaken extensive long-term testing to prove a range of sealing solutions that are now effectively operating in vacuum conditions globally.

Turcon® Variseal® gives outstanding results

Tests have been undertaken with Turcon® Variseal® in semiconductor applications. The seal was subjected to helium spray and achieved sealing with helium to 10-6 mbarl/s and with air to 10-9 mbarl/s. Theses are outstanding levels for polymeric seals.

Our range of seals for semiconductor vacuum applications:

• Fluoroelastomer (FKM) seals - Low permeation and outgassing levels
• Turcon® Varilip® PDR - Custom designed seals, they can include an inert gas barrier system
• Turcon® Variseal® - Operate at high vacuum in corrosive environments
• Wills Rings® - Suitable for low and high temperatures at hard vacuum and up to 1,000 Mpa / 145,038 psi / 10,000 bar