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Plasma is used at various stages during semiconductor wafer fabrication.
The plasma state is created when a gas is subjected to energy, breaking down its molecular integrity and dissociating it into ions and electrons. Many of the gases used to do this in semiconductor processes are toxic, reactive and pyrophoric.
Ultra-pure sealing solutions
It is essential that seals withstand this harsh plasma environment, where they will be subject to high energy and possibly elevated temperatures. Inadequate sealing can lead to contamination and affect product yield. Ultra-pure sealing solutions from Trelleborg Sealing Solutions ensure long-term reliability with minimal particulation and extremely low outgassing.
Recommended semiconductor sealing materials:
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