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Industries / Semiconductor / Application Examples / Wafer processing equipment

Semiconductor

Semiconductor

Eliminating leakage

Sealing issue:

The seal in this application was required to pass two leakage tests— helium leakage could not exceed 10 cc/sec, and when sealing water, the seal had to be drop-free. Low friction was also required.

Solution:

Flanged Turcon® Variseal® FW with a Turcon® T05 jacket and medium-load Slantcoil® spring.

Result:

In this application the flanged Turcon® Variseal® FW was used to effectively eliminate leakage across the O.D., while the medium spring provided the correct load to achieve a balance between friction and sealability.

Service Conditions:

  • 0 to 0,6 MPa / 0 to 90 psi
  • 52°C to 200°C / 125°F to 392°F
  • 0.4 rpm
  • 0.05 m/s / 0.16 ft/s
  • Hydrogen, Water, HCl

Products:

Turcon® Variseal® W Slantcoil-energized rod seal
Turcon® Variseal® FW Slantcoil-energized flange seal