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Isolast® Fab Range™
semiconductor isolast cleanroom


Isolast® Fab Range™ offers the ultimate in elastomer sealing.


These high-performance Perfluoroelastomers (FFKM) are virtually inert and demonstrate almost universal chemical compatibility while operating at continuous temperatures up to 325°C/617°F.


Industry specific sealing


Isolast® Fab Range™ sealing materials are designed for a specific semiconductor processing environments:

  • Isolast® J9610 for wet process applications - the highest level of chemical resistance.
  • Isolast® J9630 for demanding mid-temperature plasma applications - minimal outgassing and weight loss.
  • Isolast® J9650 for high-temperature wafer processing applications - ultra-high purity.
  • Isolast® J9670 for high-temperature plasma applications - superior resistance to plasma erosion.
  • Isolast® J9675 for dry/plasma wafer processes - excellent chemical resistance and minimal particulation.
  • Isolast® J9680 for demanding dry process applications - demonstrates minimal outgassing and particle generation.


The Isolast® Fab Range™ sealing materials are available in standard and non-standard O-Rings, custom molded seal designs or as bonded to metal sealing components. Seals are manufactured and packaged in a cleanroom environment.


   Isolast®Fab Range™ Publications
  Product   Language   Size
  Isolast® Fab Range™ Selection Guide English PDF 779K
  Isolast®Fab Range™ J9610 - Superior sealing for wet process applications English GIF unknownK
  Isolast®Fab Range™ J9630 - Superior sealing for aggresive plasma applications English GIF unknownK
  Isolast®Fab Range™ J9650 - Superior sealing for high temperature applications English GIF unknownK
  Isolast®Fab Range™ J9670 - Superior sealing for high temperature plasma applications English GIF unknownK
  Isolast®Fab Range™ J9675 - Universal sealing in dry/plasma wafer processes English PDF 145K
  Isolast®Fab Range™ J9675 - Universal sealing in dry/plasma wafer processes (US Version) English GIF unknownK
  Isolast®Fab Range™ J9680 - Superior sealing for aggressive plasma applications English GIF unknownK


To select the optimum material for your application use our online tools:


  • Material search allows you to identify compounds that meet specific property requirements and those that comply to specific approvals or standards.
  • Chemical compatibility check allows you to find the level of resistance of material groups to a broad range of media, both fluids or gases including those used within semiconductor manufacturing.


Both are available through the Members Area. Click here to go there now!


 
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Semiconductor Sealing Solutions (PDF 1905K)
Isolast® Perfluoroelastomer Seals (PDF 4564K)