
Isolast® Fab Range™ offers the ultimate in elastomer sealing.
These high-performance Perfluoroelastomers (FFKM) are virtually inert and demonstrate almost universal chemical compatibility while operating at continuous temperatures up to 325°C/617°F.
Industry specific sealing
Isolast® Fab Range™ sealing materials are designed for a specific semiconductor processing environments:
- Isolast® J9610 for wet process applications - the highest level of chemical resistance.
- Isolast® J9630 for demanding mid-temperature plasma applications - minimal outgassing and weight loss.
- Isolast® J9650 for high-temperature wafer processing applications - ultra-high purity.
- Isolast® J9670 for high-temperature plasma applications - superior resistance to plasma erosion.
- Isolast® J9675 for dry/plasma wafer processes - excellent chemical resistance and minimal particulation.
- Isolast® J9680 for demanding dry process applications - demonstrates minimal outgassing and particle generation.
The Isolast® Fab Range™ sealing materials are available in standard and non-standard O-Rings, custom molded seal designs or as bonded to metal sealing components. Seals are manufactured and packaged in a cleanroom environment.
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